微纳结构对电容式柔性压力传感器性能影响的研究

The Performance of Flexible Capacitive Pressure Sensor with Microstructured PDMS Films

设计制备出三明治结构的电容式柔性压力传感器,并对其性能进行研究。该传感器以银纳米线为电极材料,聚二甲基硅氧烷(PDMS)为柔性衬底,同时采用毛面玻璃和光面玻璃分别作为柔性衬底的制备模板,制备出微纳结构和平面结构的PDMS薄膜。然后采用喷涂法制备Ag NWs/PDMS复合电极,以另外一层PDMS为介电层,将两电极面对面封装,得到电容式柔性压力传感器,最后系统研究了传感器的电极微纳结构对器件性能的影响。本文研究表明,具有微纳结构的AgNWs/PDMS复合薄膜传感器的灵敏度为1.0 k Pa^(-1),而平面结构的Ag NWs/PDMS复合薄膜传感器的灵敏度为0.6 k Pa^(-1),由此可知具有微纳结构的柔性衬底能够显著提高器件的灵敏度。

The sandwich structure flexible capacitive pressure sensor was designed. The sensor adopted polydimeth- ylsiloxane（PDMS） as flexible substrate, silver nanowires as the electrode material, and PDMS as d/electric layer, in addition,the substrate was made by two kinds of structures, the obscured glass substrate with micro-nano structured surface and the smooth glass substrate wilhout micro-nano structured surface, as effective moulds for construction of flexible PDMS thin films. We laminated the two AgNWs/PDMS films together, face-to-face,with another PDMS as dielectric layer,to obtain the capacitive strain sensor, and then study the influence of micro-nano structure on the sensor sensitivity. And the sensitivity of micro-structured AgNWs/PDMS composite sensor was about 1.0 kPa-1, while the sensitivity of flat structured sensor was about 0.6 kPa-~. Research has shown that micro-nano structured e- lectrode can effectively improve the sensitivity of the device.