MEMS加速度计二阶非线性补偿方法研究

Study on the Method of Quadratic Nonlinearity Compensation of MEMS Accelerometer

微惯性集成测量组合(MIMU)中的惯性传感器,陀螺仪和加速度计的标定补偿研究大多集中在安装误差角补偿和一阶线性常数的计算上,对二阶非线性系数的测量、计算研究的不多不深。通过分析含二次非线性系数的加速度计输出模型,提出一种补偿二次非线性系数的方法,并进行了完善的理论分析和试验。最终通过计算能有效补偿MIMU的输出精度,为后续的导航信息解算奠定了基础,具有重要的工程应用价值。

Aiming at the problem that because of fixing error of the 3-axis accelerometer installed in the micro iner- tial measurement unit （MIMU） will enlarged in harsh cone movement situation, this paper puts forward a calibration- compensation method which is based on multi-position static rotation of the 3-axis position speed turntable.according to the establishment of the angle error compensation model to design the completed experiment process of calibra- tion,and finally, calculating calibration factor matrix and accelerometer＇s zero voltage accurately based on the method of nonlinear fitting data processing, according to the calibration experiment and error calculation contrast, this error of calibration method is one order of magnitude smaller than the previous one, improving the output accu- racy of the accelerometer effectively, having significant engineering application meaning.