摘要
设计了一个基于低温共烧陶瓷(LTCC)技术的无线无源双参数传感器,传感器基于LC(inductor-Capacitor)谐振原理,询问天线通过无线遥测的方式获取传感器的压力和温度信号。在传感器基板上集成了两个LC谐振回路,谐振回路中两个电容分别对压力和温度参数敏感,同时两电感采用特殊结构来减少双参数在测试时的互感串扰。搭建了温度-压力复合测试平台,对传感器进行了相关测试。传感器最高测试温度为300℃,温度灵敏度为-14.27 k Hz/℃,压力灵敏-13.75 k Hz/k Pa,实验结果表明,这种设计能明显减少两参数之间的互感影响。
A wireless passive bi-parameter sensor based on low temperature co-fired ceramic（LTCC）technology is designed.Two LC（inductor-capacitor）resonant circuits are integrated on the sensor substrate,which are based on the LC resonant theory.The two capacitances are sensitive to the pressure and temperature parameters respectively.The two inductors are arranged in a coaxial arrangement with a special winding method to reduce the mutual inductance between them.A compound test platform of temperature and pressure is set up to do the related tests of the sensor.The maximum test temperature is 300 ℃.The temperature sensitivity of the sensor is-14.27 kHz/℃,and the pressure sensitivity is-13.75 kHz/kPa.The results show that this design can significantly reduce the mutual interference between the two parameters.
出处
《传感技术学报》
CAS
CSCD
北大核心
2017年第4期592-595,共4页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金项目(61471324
51425505)
山西省青年拔尖人才支持计划项目
关键词
无线无源
双参数
LC传感器
LTCC
互感串扰
LTCC
wireless passive
bi-parameter
LC sensor
LTCC
lumped circuit
mutual interference
