辊筒模具超精密加工机床液体静压导轨热变形分析

Analysis of Thermal Deformation of Hydrostatic Guideway for Roller Mold Ultra-Precision Machine

为了提高辊筒模具光学微结构的加工精度,本文对辊筒模具超精密加工机床的直线导轨系统进行了热变形分析。首先,根据液体静压导轨的结构特点提出了有限元分析中的油膜等效替代方法,建立了有限元分析模型。其次,应用有限元软件对机床直线导轨系统进行了热-结构耦合分析,得到了其直线导轨系统热变形误差,并给出了改善辊筒模具加工机床光学微结构加工精度的方法。最后,通过微结构刨削加工实验对有限元分析结果进行了验证。

In order to improve the machining accuracy for the optical microstructure, the thermal deformation analysis of the linear guideway system for the roller mold ultra-precision machine tool is carried out. According to the structural characteristics of hydrostatic guideway, an equivalent method of oil film in finite element analysis is presented and the finite element analysis model is established. The thermal-structure coupling analysis of the linear guideway system of the machine tool is carried out by using the finite element software. The thermal deformation error of linear guideway system is obtained. The method to improve the machining accuracy of the optical micro structure of the roller mould machine is presented. The finite element analysis results are verified by the experiment of micro structure machining.