摘要
本文采用形状记忆合金(SMA)驱动的负压吸附机构能够克服MEMS吸附机构不易微小化的缺点,该吸附机构的负压模型具有一定的吸附能力,产生负压较快,能够作为MEMS的吸附机构。
The negative pressure adsorption mechanism driven by shape memory alloy（SMA） overcomes the shortcoming that the MEMS adsorption mechanism is not easy to be miniaturized. The negative pressure model of the adsorption mechanism has a certain adsorption capacity, which can produce negative pressure and can be used as the adsorption mechanism of MEMS.
出处
《科技广场》
2017年第5期101-104,共4页
Science Mosaic
基金
南昌工程学院青年基金科技项目(编号:2014KJ014)
关键词
SMA
驱动
吸附机构
负压
模型
Shape Memory Alloy
Drive
Adsorption Mechanism
Negative Pressure
Model
