低温压力传感器的研制

Development of Low Temperature Pressure Sensor

介绍了低温绝压传感器的研制过程,采用钛合金-硅-蓝宝石、陶瓷密封组件、低温电缆、插针连接等,通过材料选择和结构设计及优化,提高传感器整体耐低温的能力和绝压腔密封可靠性。研制出量程为(0~500)kPa、精度不大于0.2%FS、热漂移不大于0.03%FS/℃、工作温度范围为(-100~200)℃的低温压力传感器,可用于电离性、腐蚀性高低温介质压力的直接测量。

The paper introduces the development process of low temperature absolute pressure sensor, titanium alloy-silicon-sapphire, ceramic sealing component, low temperature cable and pin connection are used in the sensor. Through the material selection, structure design and optimization, the overall low temperature tolerance and the absolute pressure sealing cavity reliability of the sensor are improved. A low temperature pressure sensor with a range of （0-500） kPa, a precision ofno more than 0.2%FS, a thermal excursion ofno more than 0.03%FS/ DEG C, and a range of operating temperature of （-100-200） DEG C was developed, the sensor can be used for the direct measurement ofthe pressure of ionizing and corrosive high or low temperature media.