基于迈克耳孙干涉光程差放大法的微小位移测量

The method of optical-path amplification for measuring the micro-displacement based on the Michelson interference

基于迈克耳孙干涉光路,介绍了一种新的测量微小位移的实验方法.通过在迈克耳孙干涉原光路中添加平行平面镜组,使入射光和反射光在反射镜组中多次反射.当平行平面镜之间的距离发生微小变化后,两反射光束之间光程差将会被放大,通过观测干涉条纹的变化可以计算出微小的位移.设计了实验光路,对该方法进行了实验验证.与传统的迈克耳孙干涉实验相比,该方法的测量精度有很大的提高.

Based on the Michelson interferometer,this paper introduces a new experiment method to measure the micro-displacement. The incident and reflected light are multiply reflected by adding the parallel plane mirror group in the Michelson optical path. When the distance between the parallel plane mirrors presents a small change,the optical path difference of the two reflected light beams will be amplified such that the micro-displacement can be calculated according to the measured change of interference fringe. The design of experiment optical path as well as the corresponding experimental verification are achieved. The measurement accuracy is greatly improved by this proposed method comparing with the traditional Michelson experimental facility.