基于约瑟夫逊效应的高g值高分辨率加速度计的设计与仿真

Mechanism Research on High Resolution Piezoresistive Sensor Detected by Josephson Effect

针对目前压阻式加速度计分辨率不高的特点,设计了一种基于约瑟夫逊效应与硅压阻效应相结合的检测高g值的微机械加速度计,其具备信噪比低和分辨率高等优点.该加速度计采用四悬臂梁质量块结构,在悬臂梁根部附近布置压敏电阻,可将加速度输入转化成硅晶格的应变,从而引起压阻器件的阻值变化,并使测量电路的惠斯通电桥两端的电压发生变化,将该电压通过约瑟夫逊效应原理测量出来,则可反推出悬臂梁上所施加的力.通过Ansys软件对加速度计的静态及动态性能进行仿真,得出该加速度计的量程为200 000g,带宽为220kHz,响应时间为1.09μs,分辨率小于1g.

According to the characteristics of piezoresistive accelerometer resolution is not high, the design of a Joseph Johnson detection effect and piezoresistive effect is the combination of high g value of the micro accelerometer based on the low signal-to-noise ratio and high resolution.The four accelerometer with cantilever beam mass structure, the cantilever beam is arranged near the varistor, such, can be transformed into the silicon lattice strain acceleration input, causing the resistance change of piezoresistive devices, and the voltage across the Wheastone bridge measuring circuit changes the voltage measured by Joseph Johnson effect based on the principle that can be inferred the applied force on the cantilever beam.The static and dynamic performance of the accelerometer is simulated by Ansys software.The accelerometer has a range of 200 000 g, a bandwidth of 220 kHz, a response time of 1.09 μs and a resolution of less than 1 g.