期刊文献+

毛细力辅助飞秒激光直写制备各向异性及多级结构 被引量:3

Fabrication of anisotropic and hierarchical structures using femtosecond laser printing capillary force assisted self-assembly
下载PDF
导出
摘要 将飞秒激光双光子聚合加工技术和毛细力诱导自组装技术相结合实现了各向异性结构和多级结构的制备。首先,使用飞秒激光双光子加工技术加工出微柱阵列,将微柱置于显影液中显影,然后放置在空气中。在显影液蒸发的过程中,微柱结构单元受到毛细力的作用而弯曲实现自组装。通过控制微柱的高度和直径的不一致性实现了两种各向异性结构制备方法,并成功制备了底层微柱直径分别为2μm和6μm双层结构。由于毛细力的大小和微柱高度无关,且同样端部变形量下较高微柱的弹性回复力小于较低微柱的弹性回复力,更易发生弯曲;直径较大的微柱具有更强的抗弯曲能力,从而引导直径较小的微柱向较大的微柱倾斜,藉此制备了各向异性结构。使用毛细力自组装辅助飞秒激光微纳加工可以实现灵活可控的复杂3D结构的加工,并将在生物医药、化学分析、微流体等领域发挥重要作用。 A method for preparation of designable anisotropic and hierarchical structures using femto- second laser printing and capillary force assisted self-assembly was proposed. First, a periodic micro- pillar arrays template was fabricated by localized femtosecond laser polymerization. The micro-pillars were immersed in developed solution for about 40 min and subsequently exposed in the air. During the evaporation of developed solution, micro-pillars was self-assembled into periodic anisotropic architec-tures with the assistance of capillary force. Two methods to fabricate anisotropic structures were pro- posed. One was realized via controlling heights of pillars in a cell, the other was achieved via control ling pillar diameters. Furthermore, double-layer structures with underlayer pillar diameters of 2 μm and 6 μm were fabricated respectively. The results indicate that the capillary force is irrespective to the height of pillars, and the elastic restoring force of the higher pillars is stronger than the lower pil lars, thus higher pillars are prone to bend and the pillars with larger diameter are more likely to re main upright. Complex 3D structures can be achieved flexibly by combing femtosecond laser fabrica tion with capillary force self-assembly technology, which will play essential roles in biomedicine, chemistry and microfluidic engineering.
出处 《光学精密工程》 EI CAS CSCD 北大核心 2017年第8期2057-2063,共7页 Optics and Precision Engineering
基金 国家自然科学基金资助项目(No.61475149 No.51405464 No.61377006 No.51275502 No.11204250) 安徽省自然科学基金资助项目(No.1408085ME104) 教育部留学回国人员科研启动基金资助项目 安徽大学研究生学术创新研究项目
关键词 激光加工 飞秒激光 毛细力自组装 各向异性结构 多级结构 laser fabrication femtosecond laser capillary force self-assembly anisotropic structure hierarchical structure
  • 相关文献

参考文献1

二级参考文献13

  • 1龚小竞,褚家如,杨建军,张铁群,朱晓农.改进的飞秒激光加工微型光波导方法[J].光学精密工程,2007,15(1):27-32. 被引量:7
  • 2ZHANG Y L,CHENG Q D,XIA H,etal.Designable 3D nanofabrication by femtosecond laser direct writing[J].Nanotoday,2010,5 (5):435-448.
  • 3TORMEN M,BUSINARO L,ALTISSIMO M,et al.3D patterning by means of nanoimprinting,X-ray and two-photon lithography[J].Microelectronic Engineering,2004,73:535-541.
  • 4SHOJI S,KAWATA S.Photofabrication of threedimensional photonic crystals by multibeam laser interference into a photopolymerizable resin[J].Applied Physics Letters,2000,76 (19):2668-2670.
  • 5KATO J,TAKEYASU N,ADACHI Y,et al.Multiple-spot parallel processing for laser micronanofabrication[J].Applied Physics Letters,2005,86 (4):044102-044104.
  • 6DONG X Z,ZHAO ZH SH,DUAN X M.Micronanofabrication of assembled three-dimensional microstructures by designable multiple beams multiphoton processing[J].Applied Physics Letters,2007,91(12):124103-124105.
  • 7HAYASAKI Y,SUGIMOTO T,TAKITA A,et al.Variable holographic femtosecond laser processing by use of a spatial light modulator[J].Applied Physics Letters,2005,87 (3):031101-031103.
  • 8GITTARD S D,NGUYEN A,OBATA K,etal.Fabrication of microscale medical devices by twophoton polymerization with multiple foci via a spatial light modulator[J].Biomedical Optics Express,2011,2(11):3167-3178.
  • 9LIN H,JIA B H,GUM.Dynamic generation of debye diffraction-limited multifocal arrays for direct laser printing nanofabrication[J].Optics Letters,2011,36(3) :406-408.
  • 10KUANG Z,PERRIE W,LIU D,et al.Ultra short pulse laser patterning of indium tin oxide thin films on glass by uniform diffractive beam patterns[J].Applied Surface Science,2012,258 (19):7601-7606.

共引文献5

同被引文献18

引证文献3

二级引证文献9

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部