光栅传感器细分技术的研究

Study on Subdivision Technology of Grating Sensor

光栅传感器输出信号的细分技术是实现高分辨率位移光栅测量的关键技术。利用正切函数曲线在最开始一段区间线性度较好适合高倍数细分的特点,把该区间的正切值细分并制成与细分数相对应的数据表。建立实际的李沙育圆与标准圆的转换关系,把实际测得的信号转换成标准圆中的数值。通过查表来获取准确的细分值,有效的提高了运算速度,细分倍数提高到两千份,使分辨率达到了纳米级的测量水准。通过实验测试,在测量过程中没有出现丢失数据的现象,计数稳定、准确。

The subdivision technology of Grating sensor output signal is the segmentation technique to realize high resolution grating displacement measurement. Using the characteristics that, in the interval at the beginning period of interval, the linearity of the tangent function better fits the subdivision with high multiple, segmenting the tangent value in this region and making a data table corresponding with subdivision then building a transformation relation between the actual Lisaru circle and standard circle, so that the actual measured signal can be converted to the standard circle value, we can obtain the accurate segmentation through a look-up table, which effectively improves the operating rate, increases the segmentation multiple to two thousand, and achieves the resolution to Nano-scale measurement standard. Through the experiment testing, there was no the phenomenon of obliterated data during the measurement process, and the count is stable and accurate.