固态微波功率器件测量夹具及其校准技术研究

Study on Measuring Fixture and Calibration Technology of Solid State Microwave Power Devices

固态微波功率器件由于其封装形式的特殊性,测量过程中必须引入测量夹具作为桥梁,才能完成接口形式的转换,进而开展测试工作。针对固态微波功率器件微波电参数在测试中,测量夹具给测量结果带来影响的问题,对固态微波功率器件测量夹具及其校准技术进行了研究。文章介绍了采用TRL校准方法,并利用矢量网络分析仪的误差修正功能来去除测量夹具误差,从而得到被测器件的真实性能参数。通过具体试验数据表明,对测量夹具的校准和误差的去除是可行有效的,从而可以在测量结果中去除测量夹具的影响而得到被测器件的"净"参数。

The packaging of solid state microwave power devices is special, so it is necessary to use measuring fixture as the bridge in the measurement process and the conversion of the interfaces for convenience of the testing. In microwave electric parameters test of solid state micro-wave power devices, the measurement errors caused by measuring fixture cannot be ignored, and this paper studies the measuring fixture and calibration technology of a solid state microwave power device. In this paper, the TRL calibration method is adopted, the error correction function of the vector network analyzer is used to remove the error of measuring fixture, and thus the real performance parameters of the device are obtained. The test data show that it is feasible and effective to calibrate the measurement fixture and remove the error, so that the pure parameters can be obtained by removing the effects of the measuring fixture.