摘要
In recent years, modern optical processing technologies, such as single point diamond turning, ion beam etching, and magneto-theological finishing, arc getting break- throughs. Machining precisions of super-smooth optics have also been significantly improved. However, with increasing demands for the optical surface quality,
In recent years, modern optical processing technologies, such as single point diamond turning, ion beam etching, and magneto-theological finishing, arc getting break- throughs. Machining precisions of super-smooth optics have also been significantly improved. However, with increasing demands for the optical surface quality,
基金
supported by the National Natural Science Foundation of China(Nos.61627825 and 11275172)
the State Key Laboratory of Modern Optical Instrumentation Innovation Program(MOI)(No.MOI2015 B06)
