导模法生长六片片状蓝宝石晶体的研究

Study on Six Sapphire Ribbons Crystal Grown by Edge Defined Film Fed Growth

采用导模法生长出六片片状蓝宝石晶体,单片尺寸为350 mm×80 mm×2 mm。通过CGSim模拟软件模拟计算和实验验证,确定了合适的生长温场为横向温梯2.9~4.6 K/mm,生长速度控制在5~10 mm/h之间。对晶体进行双晶摇摆曲线测试,峰强度很高且对称性良好,摇摆曲线的半高宽FWHM=16.946″,证明晶体的结晶完整性很高。采用化学腐蚀法对六片晶体进行位错密度的检测,计算出晶体的位错密度都在10~3量级,中间晶体位错密度小于两边晶体的位错密度。测试了六片晶体的弯曲强度,最高强度达1583 MPa,中间晶体强度大于两边。

The six sapphire ribbons single crystal was grown by edge defined film fed growth（ EFG）method. Single crystal size is 350 mm × 80 mm × 2 mm. The appropriate thermal field as the radial temperature 2. 9-4. 6 K/mm and growth speed control between 5-10 mm/h were determined by CGSim simulation software simulation calculation and experimental verification. The crystallization of the crystal had proved by test crystal rocking curve,the peak intensity is very high and symmetry,and rocking curve of half high FWHM is 16. 946″. The crystallization of the crystal is good. Crystal dislocation density was calculated through corrosion in level 10~3,and the middle crystal dislocation density is less than the crystal on both sides. The bending strength of six sapphire ribbons single crystal was tested,and the highest strength is 1583 MPa,the middle crystal strength is greater than both sides.