关于集成电路可靠性退化行为仿真的进展

A Progress on IC Reliability Simulation of Degradation Behaviors

随着集成电路线宽的等比例缩小,可靠性问题日益严重。可靠性设计(Design-ForReliability),即要求设计人员在电路设计时考虑器件可靠性失效模型,并进行仿真,力求在设计阶段就保证电路长期稳定运行。介绍集成电路中的关键可靠性问题,分别阐述了HCI、NBTI、TDDB和EM的物理失效机理以及业界通用的经验模型,并总结了目前主要的商用可靠性仿真工具及其流程。

Reliability issues become more and more severe with the device＇ s line width down scaled. DFR （design for reliability） requires designer to consider reliability issues early in the design phase. Circuit reliability simulations need to be performed to ensure the long- term stability of the circuit performance. Some reliability concerns are introduced in this paper. Physical mechanism and experimental models of HCI, NBTI, TDDB and EM that accepted publicly are demonstrated. And main reliability simulation tools are summarized.