摘要
研究了MEMS摆镜在未来小型化激光成像雷达的系统中的应用。首先介绍了MEMS摆镜自身的器件特性,结合脉冲成像激光雷达的应用背景,分析了系统设计时要注意的问题。进一步设计了MEMS摆镜的驱动模块,通过仿真和成像验证了李萨如扫描图形的应用。
The application of MEMS mirror in the future compact laser imaging radar system was studied. Firstly, the features of MEMS mirror were introduced. Considering the application background of pulse laser imaging radar, the concerned problems in designing the system were analyzed. And then the driving module of MEMS mirror was de- signed. At last,the application of Lissajous scanning pattern is verified by simulation and imaging.
出处
《激光与红外》
CAS
CSCD
北大核心
2017年第9期1149-1153,共5页
Laser & Infrared
