硅胶基衬底表面高分辨复杂可延展电路的印刷制备

Fabrication of stretchable circuit with high resolution linewidth and complex pattern via printing method on silicone substrate

柔性可延展电子因其能够适应非平面工作环境,将突破现有电子器件的应用范围,促进信息与人的融合,在智能穿戴电子、柔性显示、生物医疗等领域具有广阔的应用前景。本文提出利用印刷结合真空抽滤方法实现硅胶基衬底表面高分辨复杂可延展电路的制备;研究了丝网印刷工艺实现微孔滤膜表面银纳米线(Ag NWs)图形化沉积的分辨率;讨论了Ag NWs线长、抽滤真空度等因素对沉积分辨率的影响,实现了Ag NWs图形化50μm线径分辨率及间隔分辨率。本文还研究了硅胶基衬底表面微电极的电阻均一性及拉伸电阻稳定性,并结合电极表面微结构的变化详细讨论了屈曲褶皱结构的出现对微电极拉伸电阻的影响,实现了100μm线宽微电极100%拉伸幅度下电阻增加仅为初始值的40%。最后,通过集成LED芯片演示了面料基底表面柔性可延展发光电路。本研究对于柔性可延展电路的制备提供了新的思路。

Stretchable electronics have attracted much more attention in recent years due to their excellent conformability to non-planar objects and potential applications in wearable electronics, flexible display and bioengineering. In this work, a fast and efficient method has been developed for fabrication of stretchable electrodes with complex pattern by printing assisted vacuum filtration. The linewidth of the patterned Ag NWs electrodes is down to 50 μm, and the enlarged SEM image shows the Ag NWs line with well defined sharp edge. The microelectrode array on the silicon substrate has excellent uniformity of resistance, and the stretchable electrode is also very stable under repeated strain condition. It is shown that the resistance increases only 40% when the tensile strain is doubled. The buckling structure of Ag NWs/PDMS composite layer results in the resistance stability under strain condition. Also demonstrated is the stretchable lighting circuit integrated on textile for wearable application.