磁控溅射技术沉积NSN70隔热膜的实验研究

Experimental study on NSN70 heat-insulating film produced by magnetron sputtering

利用磁控溅射技术,在柔性基材PET上沉积Ag Cu合金制备的NSN系列隔热膜,继承了单Ag隔热膜良好的光谱选择性,同时能有效的解决Ag易硫化的难题。通过选择合适的Ag Cu合金靶材、NSN70隔热膜的膜系设计与制备、样品的形貌检测、耐候性实验、光学性能测试等多方面研究了NSN隔热膜。实验结果为以后大规模工业化生产NSN系列隔热膜奠定基础。

Using magnetron sputtering technique, NSN series of heat-insulating films were produced by AgCu alloy deposited on the PET substrates. The NSN series of heat-insulating films solve the problem that single Ag is easily vulcanized in the atmosphere. With the proper AgCu alloy target, the structural design of NSN series of heat-insulating film products, the pattern detection of the NSN films,the weather resistance of the NSN films and the difference between the NSN films and single Ag insulation film on the spectral selection performance were studied. These results lay the foundation for the large-scale industrial production of NSN series heat insulation film in the future.