一种大行程直线光栅尺自动检测系统

为克服检测大量程直线光栅尺的困难,介绍一种大行程直线光栅尺自动检测系统。该系统利用12m滚珠丝杠副提供位移驱动,利用三轴激光干涉仪作精密位置测量,利用PMAC卡作交流电机的闭环控制,实现了对10m长度的直线光栅尺进行自动检测的功能。在滚珠丝杠中间增加4个辅助支撑,介绍支撑结构,解决其过长而带来的塔腰问题。

In order to overcome the difficulty of detecting large range linear grating, a kind of automatic detection system of large stroke linear scale is introduced. The system uses 12 m ball screw to provide displacement drive, the use of three-axis laser interferometer for precision position measurement, the use of PMAC card for AC motor closed-loop control, to achieve the 10 m length of the linear scale for automatic detection function. In the middle of the ball screw to increase the four auxiliary support, introduced support structure, to solve its bending problem.