光配向制程参数对预倾角及其光电性能的影响

Effects of photo-alignment process parameters on pre-tilt angle and photoelectric properties

为了满足市场对LCD面板高对比度、高画质的需求,光配向作为一种非接触式的新型配向方法正被广泛研究。本文采用光裂解型聚酰亚胺取向材料制备得到IPS型测试液晶盒,并针对光配向成膜条件与其所形成的光电效应进行研究。通过FT-IR、AFM、偏光板角度测试机等仪器对不同pre-bake和post-bake温度和时间下的测试盒的预倾角及光电特性进行了表征。结果显示,pre-bake、post-bake的温度和时间与预倾角、穿透率、对比度和电压保持率均存在一定的相关性。本文的研究可以为后人对光配向制程相关参数的优化提供借鉴。

In order to meet the requirement of the market for LCD panePs high contrast and high image qual- ity, photo-alignment as a new type of non-contact alignment method is being widely studied. An IPS test cell was prepared by using an alignment material of photo-decomposition type polyimide, then film forming condi- tions and photoelectric effect of the cell were researched. Pre-tilt angle and photoelectric properties at different temperature and time of pre-bake and post-bake were characterized by FT-IR, AFM, Polarizing plate angle tester, etc. Results showed that temperature and time of pre-bake and post-bake had some relationship with pre-tilt angle, transmittance, contrast ratio and VHR. In this paper, the research could serve as a reference to the optimization of photo-alignment process parameters.