摘要
高纯度的六氟乙烷主要用于蚀刻气体、器件清洗剂、制冷剂等行业。本文介绍了六氟乙烷的性质、制备以及高纯度六氟乙烷的纯化方法,并提出纯度对应用前景的重要性。
Highly pure hexafluoroethane is used for etching gases, cleaning agents and so on.It introduced the properties, preparation and purification methods of hexafluoroethane and proposed the importance of purity to application prospect.
作者
丁元胜
蔡伟豪
褚晨啸
白占旗
张金柯
缪光武
张建君
张波
DING Yuan-sheng CAI Wei-hao ZHU Chen-xiao BAI Zhan-qi ZHANG Jin-ke MIAO Guang-wul ZHANG Jian-junz ZHANG Bo(Zhejiang Chemical Industry Research Institute Co., Ltd., Hangzhou, Zhejiang 310023,China College of Engineering ,Zhejiang University of Technology ,Hangzhou , Zhejiang 310032 ,China College of Chemical Engineering,Zhejiang University of Technology, Hangzhou, Zhejiang 310032, China)
出处
《浙江化工》
CAS
2017年第9期1-5,共5页
Zhejiang Chemical Industry
关键词
六氟乙烷
性质
电子气体
高纯
应用
hexafluoroethane
property
E-gas
purity
application
