基于ELID磨削与抛光技术的PDC加工工艺研究

Research on PDC processing technology based on ELID grinding and polishing technology

针对聚晶金刚石复合片(PDC)在加工过程中硬度高、精度低等难题,在半精磨阶段采用ELID磨削技术对其进行加工试验以研究其去除机理及存在的缺陷。为解决ELID磨削PDC存在的缺陷,在精加工阶段对PDC进行了抛光试验。通过采用二次通用旋转组合方法对影响PDC表面粗糙度的各工艺参数进行抛光试验设计。首先利用DPS数据处理系统软件对试验结果进行分析得到PDC表面粗糙度二次回归数学模型及各工艺参数对PDC表面粗糙度的单因素和交互作用影响规律。然后利用lingo软件优化得到PDC抛光最佳工艺参数为抛光压力80 kPa,抛光盘转速1 200r/min,抛光液磨粒粒度2μm,抛光时间45 min,并在此最佳工艺参数下抛光PDC获得表面粗糙度为15 nm的已加工表面。

Aiming at high hardness,low precision and other defects of polycrystalline diamond（ PDC） during processing,in the semi-fine grinding stage,the ELID grinding technology was used to study the removal mechanism and the defects in this article. In order to solve the defects in ELID grinding PDC,polishing experiment of PDC was studied in the finishing stage. Taking into account the impact of PDC surface roughness about process parameters,polishing experiment was designed by using the method of quadratic general rotary unitized design. First of all,the experimental results were analyzed in order to get secondary regression mathematical model and univariate and interaction influence of PDC surface roughness by using DPS data processing system software. Then,optimum process parameters with the polishing pressure of 80 kPa,polishing disc speed of 1 200 r/min,the polishing liquid abrasive particle size of 2 μm and polishing time of 45 min is obtained by Lingo software. And the machined surface roughness of R_a 15 nm is obtained under the optimum process parameters.