电磁感应加热蒸发金属铈及蒸气密度测量

Metal Cerium Evaporation by Electromagnetic Induction Heating and Vapor Density Measurement

通过对金属Ce蒸发行为的分析,确定了合适的蒸发温度,在此基础上开展了电磁感应蒸发装置的设计及蒸发技术研究。对金属Ce蒸发速率进行了测定,并采用膜厚法分析蒸气密度分布,称重法测量了蒸气密度。结果表明:2 000℃左右金属Ce蒸发速率约为99~135g/h,实测值略低于理论值;金属Ce原子蒸气密度分布近似为余弦函数高次幂分布,原子蒸气密度约为10^(11) atom/cm^3量级。采用电磁感应加热蒸镀金属Ce薄膜具有应用可行性。

The evaporation behavior of metal cerium was analyzed and proper evaporation temperature was determined. And then design of the electromagnetic induction evaporation device and research of evapora- tion technology were carried out. Evaporation rate of metal cerium was measured, vapor density distribu- tion was analyzed with film thickness method, and vapor density was measured with weighing method. The results show that evaporation rate of metal cerium at 2 000 ℃ is about 99-135 g/h,and the measured val- ue is slightly lower than the theoretical value. The density distribution of cerium vapor approximately fol- lows the relationship of high order power of cosine function,and atomic vapor density magnitude is about 1011 atom/cm3. The application of electromagnetic induction heating evaporation for cerium film deposition is feasible.