摘要
通过对金属Ce蒸发行为的分析,确定了合适的蒸发温度,在此基础上开展了电磁感应蒸发装置的设计及蒸发技术研究。对金属Ce蒸发速率进行了测定,并采用膜厚法分析蒸气密度分布,称重法测量了蒸气密度。结果表明:2 000℃左右金属Ce蒸发速率约为99~135g/h,实测值略低于理论值;金属Ce原子蒸气密度分布近似为余弦函数高次幂分布,原子蒸气密度约为10^(11) atom/cm^3量级。采用电磁感应加热蒸镀金属Ce薄膜具有应用可行性。
The evaporation behavior of metal cerium was analyzed and proper evaporation temperature was determined. And then design of the electromagnetic induction evaporation device and research of evapora- tion technology were carried out. Evaporation rate of metal cerium was measured, vapor density distribu- tion was analyzed with film thickness method, and vapor density was measured with weighing method. The results show that evaporation rate of metal cerium at 2 000 ℃ is about 99-135 g/h,and the measured val- ue is slightly lower than the theoretical value. The density distribution of cerium vapor approximately fol- lows the relationship of high order power of cosine function,and atomic vapor density magnitude is about 1011 atom/cm3. The application of electromagnetic induction heating evaporation for cerium film deposition is feasible.
作者
罗立平
张赫
LUO Li-ping ZHANG He(Research Institute of Physical and Chemical Engineering of Nuclear Industry,Tianjin 300180,China)
出处
《稀有金属与硬质合金》
CSCD
北大核心
2017年第4期37-41,共5页
Rare Metals and Cemented Carbides
关键词
金属Ce薄膜
电磁感应加热
蒸发
蒸气密度
蒸气密度分布
metal cerium film
electromagnetic induction heating
evaporation
vapor density
vapor density distribution