多孔阳极氧化铝膜的制备及其膜结构影响因素研究

Research on preparation of porous anodic aluminum oxide film and its structure influencing factors

以铝为模板,通过二次阳极氧化法制备多孔阳极氧化铝(AAO)膜,利用原子力显微镜观察AAO膜的微观形貌,分析退火处理、电化学抛光处理、阳极氧化电压、阳极氧化时间等因素对AAO膜结构的影响,结果表明:AAO膜的物相为非晶态,但经高温退火处理所得AAO膜会被部分晶相化;电化学抛光能有效改善孔洞分布的均匀性.当氧化电压在40~55 V范围内,AAO膜的孔径随着阳极氧化电压的升高而增大,膜孔洞结构排布的有序性也得到增强;膜孔孔径大小分布在40~100 nm之间;阳极氧化时间对膜的孔径没有显著影响;当电解液温度在0~20℃范围内,AAO膜的孔径随着电解液温度的升高而减小,且AAO膜的有序性也随之增强.

Porous anodic alumina（AAO） film was prepared by using two anodic oxidation method and aluminum as template.The microstructure of AAO film was observed by atomic force microscopy.The effects of annealing treatment,electrochemical polishing treatment,anodizing voltage and anodizing time on the structure of AAO film were analyzed.The results showed that the AAO film was amorphous phase,but after high temperature annealing of the AAO film would be part of the crystal phase.The electrochemical polishing of the AAO film pore structure could improve the evenness of pore distribution.When the oxidation voltage was in the range of 40~55 V,pore size of AAO film increased with increasing of anodizing voltage,orderly arrangement of film pore structure had also been enhanced,and the pore size of the membrane pores was between 40 nm and 100 nm.Anodic oxidation time had no significant effect of pore size on the film.When the electrolyte temperature was 0~20 ℃,pore size of AAO film decreased with increasing of the electrolyte temperature,order degree of AAO film also increased.