多晶硅后处理生产工艺设计方案

Design Scheme for Post-treatment Process for Polysilicon

多晶硅后处理生产工艺是多晶硅生成后的二次加工过程,国内目前没有成熟的设计方案。基于多晶硅后处理工程设计经验,介绍了该工艺的生产任务、原料要求及最终产品,阐述了其生产工艺的各个工序的设计要点与要求,以及工艺改进与平面布置,供同行参考。

The polysilicon post-treatment process is secondary processing after generation of polysilicon. So far,there are no established design schemes.Based on experiences for the engineering design for post-treatment of polysilicon,the production requirements,raw materials requirements and finished product are described,and design highlights and requirements for each section of the process are provided,as well as process improvements and plan layout,for reference.