四自由度组合柔性铰链的设计及性能分析

Design and Performance Analysis of Flexible Hinges With Four Degrees of Freedome

设计一种由3个柔性铰链组成的,用于高精密磨床的微位移工作平台.通过3个柔性铰链对输入位移进行缩小,呈线性地输出,实现在工件定位过程中对珤X平移、珝Z平移、X旋转、Z旋转4个方向自由度的微小位移及角度调整的功能.优选3个柔性铰链所使用的材料,运用ANSYS仿真软件分析3个柔性铰链输入位移与输出位移、输出角位移之间的响应关系,以及工作过程中各个柔性铰链内部的应力大小.结果表明:工作台珤X方向,珝Z方向的输出输入位移比分别为0.137,0.286μm·μm^(-1);X旋转,Z旋转的输出输入位移比分别为6.516×10^(-4),2.180×10^(-3)(°)·μm^(-1);在零件最大加载位移以内,输出响应与输入位移之间都呈现良好的线性关系,误差均在0.1%以内.

A micro-displacement worktable with three flexible hinges has been designed in this study.Its degrees of freedom along linear（X,Z）axes,around rotary（X,Z）axes can be adjusted for fine positioning of small parts machined by high-precision grinding machine.The materials of three flexible hinges have been selected under consideration of equal life design of parts.The response relationships between output linear/angular displacement and input displacement have been analyzed by using finite element software ANSYS.The ratios of output linear displacement alongX,Zaxes to input displacement are 0.137,0.286μm·μm^（-1）,respec-tively,and those of output angular displacement around X and Z axes to input displacement are 6.516×10^（-4）,2.180×10^（-3）（°）·μm^（-1）,respectively.Within the maximum load displacement range,the relationships between output displacement and input displacement are linear,and the linearity errors are less than 0.1%.