石英微机械陀螺双轴减振设计

Design of Biaxial Vibration Damping Device of Quartz Micromachined Gyroscope

石英微机械陀螺是一种应用广泛的惯性测量元器件,对于常见的双轴微机械陀螺,在使用过程中需要同时测量两个轴向的角速度,但各敏感元器件间存在振动干扰。因此,需要减振结构降低这种干扰,若采用单轴减振结构,则每个敏感元器件都需要减振结构,导致双轴微机械陀螺的体积较大,为解决这一问题,设计了一种石英微机械陀螺双轴减振装置,采用新型减振体和减振橡胶垫环形分布的稳固结构,且通过有限元ANSYS软件仿真优化。结果表明,石英微机械减振装置可有效避开石英微机械敏感元器件的工作频率,减振效果良好,可达97%,减少了外界噪声,提高了石英微机械双轴陀螺的性能。

The quartz micromachined gyroscope is a widely used inertial measurement component.In the application of biaxial gyroscope,two axial angular velocities need to be measured at the same time,but there is vibration interference between the sensitive devices,and the vibration reduction structure should be adopted to reduce the interference.When the uniaxial vibration reduction structure is used in the gyroscope,each sensitive element needs a vibration reduction structure,which leads to larger volume of biaxial micromachined gyroscope.In order to solve this problem,a biaxial vibration damping device of quartz micromechanical gyroscope is designed to reduce the vibration of two-axis gyroscope.A new type of vibration damping body and vibration ring rubber ring are used as the stable structure and the simulation and optimization are carried out by ANSYS software.The results show that the quartz micro-mechanical vibration damping device can avoid the working frequency of the quartz micro-mechanical sensitive device effectively,the damping effect is more than 97%.The structure can reduce the external noise effectively and improve the performance very well.