AlN压电薄膜换能器性能的仿真研究

Simulation Study on Performance of AlN Piezoelectric Thin Film Transducer

在压电换能器的制作中,电极对其谐振和反谐振频率、机电耦合系数及品质因数等重要性能有着直接的影响。该文针对AlN压电薄膜复合结构,采用COMSOL Multiphysics有限元软件对电极-AlN-不锈钢结构的三维模型进行了压电-结构耦合分析。基于此模型,通过改变电极厚度、材料及压电层的介电和机械损耗等参数,来研究换能器的性能参数变化,研究结果对后续以不锈钢为基底的压电超声换能器的制作起到了一定的理论指导作用。

In the fabrication of piezoelectric transducers,the electrode has a direct influence on the important performances,such as resonance and anti-resonance frequency,quality factor,electromechanical coupling coefficient,etc.Aiming at the AlN piezoelectric film composite structure,apiezoelectric-structure electromechanical coupling analysis of the 3 D model based on electrode-AlN-stainless steel structure is carried out by using COMSOL Multiphysics finite element analysis software in this paper.Based on this model,the transducer performance parameters change is studied by altering the electrode thickness and materials,dielectric loss and mechanical loss of piezoelectric layer.The results of the study on the follow-up to stainless steel as the base of the piezoelectric ultrasonic transducer system has a certain theoretical guidance.