数字式电容薄膜绝对压力变送器的设计研发

Design and development of digital capacitor film absolute pressure transmitter

模拟式电容薄膜式绝对压力变送器(简称电容薄膜规)已在众多领域成为粗、低真空精确测量的市场主流。随着现代化工业的发展,先进的制造业对真空测量的准确度、稳定性和抗干扰能力,提出了更高的要求。针对电容薄膜规原有的技术瓶颈,本文所研究的数字式电容薄膜规,就是一种很好的改进和完善方案,经过现场试验,达到了理想的技术指标要求,验证了本文提出的数字式电容薄膜规的探索是正确的、可行的。

The analog capacitance film absolute pressure transmitter （or capacitor film gauge） has become the mainstream measuring method for rough and coarse vacuum in many fields. With the development of modern industry, the advanced manufacturing industry has put forward higher requirements for the accuracy, stability and anti-interference ability of vacuum measurement. Aimed at the technical bottleneck of capacitance film gauge, the digital capacitance film gauge is a good improvement plan and is studied in this paper. After field test, the ideal technical index requirement was achieved. It is proved that the as-proposed design is feasible for the exploration of digital capacitance films gauge.