一种便携式干涉仪动镜系统的设计

Design of a Moving Mirror Scanning System for Portable Interferometer

动镜扫描系统是傅里叶变换红外光谱仪中唯一不断运动的部件,其扫描的精度与行程直接影响仪器的信噪比、重复性与分辨率等指标。在利用立体角镜的光学特性和柔性簧片枢轴的机械特性的基础之上,设计了一种结构紧凑,体积小巧的干涉仪动镜扫描系统,设计了基于模糊控制算法的控制器,对动镜的扫描速度进行精密的控制。实验表明,动镜机构的扫描稳定性优于99.8%,所测得的红外光谱具有较高的信噪比能够满足高精度定量分析的要求。

The movable mirror is used to distinguish optical path difference in a continuous scanning FTIR.Moving mirror scanning system is the only moving part in FTS,the accuracy of scan and the distance of scan,would affect the signal to noise ratio（SNR）,repeatability and resolution of the instrument directly.A moving mirror scanning system that based on flex cross-spring pivots were designed,and a fuzzy controller was designed to ensure that the movement of the moving mirror system is collimated,uniform and smooth,with the control accuracy up to 99.8%.