一种基于二次模板匹配的晶圆对准方法

Wafer Alignment Method Based on Two Time Template Matching

介绍了在二极管探针台测试晶圆过程中一种晶圆自动对准方法。在承片台上放置晶圆后,首先利用一次模板匹配实现对晶圆偏转角度的调整;然后,晶圆上的特征点移至CCD视场范围内,对初始特征点进行二次模板匹配,再将晶圆上的测试起点移至测试探针下方完成对准工作。

An automatic wafer alignment method for wafer testing in a diode probe is introduced. Placing the wafer in the wafer stage after the first use of a template matching of wafer deflection angle adjustment;then the feature points to the CCD field of view on the wafer,the initial feature points for the two template matching,then complete the test to the test probe alignment work starting point on the wafer under.