摘要
介绍了在二极管探针台测试晶圆过程中一种晶圆自动对准方法。在承片台上放置晶圆后,首先利用一次模板匹配实现对晶圆偏转角度的调整;然后,晶圆上的特征点移至CCD视场范围内,对初始特征点进行二次模板匹配,再将晶圆上的测试起点移至测试探针下方完成对准工作。
An automatic wafer alignment method for wafer testing in a diode probe is introduced. Placing the wafer in the wafer stage after the first use of a template matching of wafer deflection angle adjustment;then the feature points to the CCD field of view on the wafer,the initial feature points for the two template matching,then complete the test to the test probe alignment work starting point on the wafer under.
出处
《机电产品开发与创新》
2017年第5期141-143,共3页
Development & Innovation of Machinery & Electrical Products
关键词
模板匹配
自动对准
晶圆
探针台
图像识别
机器视觉
Template matching
automatic aligmnent
wafer
probe station
image recognition
machine vision