基于超声振动钻削系统的换能器设计

Design of the transducer based on the ultrasonic vibration drilling system

为使超声振动钻削的换能器性能更加稳定,基于实验数据,提出解析法与有限元法相结合的模式对换能器进行设计,并进行阻抗分析和振动性能测试实验。结果表明,换能器前盖板输出端振幅达4.2μm,在陶瓷晶片工作温度低于70°C的状态下换能器可稳定工作13 h,且工作频率波动幅度小于130 Hz。测试结果验证了设计方法及思路的可行性,所提出的换能器设计方法可推广应用于一般超声振动钻削加工。

In order to make the performance of the transducer used in ultrasonic vibration drilling more stable,the design method of transducer is proposed according to a combination of the analytical method and finite element method based on the experimental data,then the impedance is analyzed and the vibration performance of transducer is tested. The results show that the output amplitude of front shroud of transducer is 4. 2 μm,and the transducer can run 13 hours steadily under the condition that the temperature of ceramic chip is lower than 70℃,and the fluctuating margin of work frequency is less than 130 Hz. The test results validate the design methods,and transducers made through this design method can be applied in ultrasonic vibration drilling.