热处理工艺对MgB_2超导薄膜制备和表面形貌的影响

The effect of heat processing on the growth and surface topography of MgB_2 superconducting thin film

MgB_2作为一种独特而重要的高温超导材料(HTS),具备超导转变温度高,相干长度大,临界电流和临界磁场高等优势,具有在超导电子学领域大规模应用的潜力。基于MgB_2超导薄膜的超导器件的制备是该材料能否走向大规模应用的关键。在MgB_2超导薄膜的CVD法制备过程中,通过优化退火工艺的温度参数,使得MgB_2超导薄膜在单晶基片上的附着和稳定性增强。加入回火处理工艺,提高了薄膜表面的平整度,为MgB_2超导薄膜从材料走向器件创造了条件。

As an unique and important kind of HTS material, the superiorities ot＇ Magnesium diboride（ MgB2 ） in supercon- ducting characters cover high superconducting transition temperature, long coherenc.e length, high critical current and critical field,thus the application of MgB2 is very potential in the superconducting electronics fields. The preparation of MgB2 supercon- ducting devices is thought as the master key of the large - scale applications. In the CVD prepatation of MgB2 superconducting thin film, we found the adhesiveness and stability of MgB2 film on the single crystal substrates could be enhenced via the optimi- zation of annealing process, and the flatness of the surface of MgB2 film could be improved by the tempering process.