摘要
以波长为1064nm的超短脉冲激光(脉宽为10ps)作为成丝激发源,引导自聚焦效应在蓝宝石内部产生了突破瑞利长度限制的成丝线迹。利用成丝区因相变而造成的与材料其他区域物相的不同,辅以化学腐蚀的方法,获得了切面粗糙度为800nm的蓝宝石切割件,该技术可实现自由路径切割。分析了皮秒激光的成丝特征和技术实现的工艺参数,确定了皮秒激光在蓝宝石内的自聚焦阈值功率为2.78×106 W,探究了激光峰值功率、聚焦位置及辐照点脉冲数对皮秒激光在蓝宝石内部成丝起始位置和切割质量的影响,获得了实现蓝宝石高精度切割的工艺参数。
The ultra-short pule laser with the wavelength of 1064 nm and the pulse width of 10 ps is used as filamentation excitation source to induce the self-focusing effect inside sapphire creating a long filamentation trace,and the length of the filamentation trace breaks through the limitation of Rayleigh length.On the basis of different phases between filamentation region and the rest of the sapphire,we obtain fine cutting-surface of sapphire with roughness of 800 nm with the help of chemical corrosion.Arbitrary cutting paths can be achieved by this technique.The filamentation characteristics of picosecond laser and the processing parameters for the presented technique are studied.The laser power threshold of self-focusing effect is determined to be 2.78×10^6 W.The effects of picosecond laser peak power,focusing position and the number of pulses on the initial position of filamentation and cutting quality are investigated.The processing parameters for realizing high precision cutting of sapphire are obtained.
作者
燕天阳
季凌飞
Li Lin
Amina
王文豪
林真源
杨强
Yan Tianyang Ji Lingfei Li Lin Amina Wang Wenhao Lin Zhenyuan Yang Qiang(Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China Laser Processing Research Center, The University of Manchester, Manchester M13 9PL, United Kingdom)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2017年第10期59-66,共8页
Chinese Journal of Lasers
基金
国家自然科学基金(51575013
51275011)
关键词
激光技术
超快激光
成丝效应
蓝宝石
化学腐蚀
高精度切割
laser technique
ultrafast laser
filamentation effect
sapphire
chemical corrosion
high precision cutting