摘要
通过安装视频采集软件,从监视窗口记录相移过程.再从捕获视频中选出一组相移干涉图,经过相位计算,可得到波面分布.介绍了数据处理流程,编写了相关程序.将本方法与Zygo干涉仪MetroPro的计算结果进行了比较,φ_p和φ_(RMS)偏差分别为0.005λ和小于0.001λ.Zernike多项式拟合结果也验证了该方法的准确性和有效性.
Video capture software was installed to record the process of phase shifting measurement from the monitor window.A group of phase shifting interferograms were selected from the captured video,and the wavefront map was calculated.The data processing scheme was described in detail,and the relevant code had been written.The calculated results were compared with Zygo MetroPro.The deviations of φ_p and φ_（RMS） were 0.005λand less than 0.001λ respectively.The accuracy and effectiveness of this proposed method were also verified by the Zernike polynomials fitting results.
出处
《物理实验》
2017年第10期53-57,共5页
Physics Experimentation
基金
江苏省"六大人才高峰"项目资助(No.2015-DZXX-026)
苏州科技大学校科研基金项目资助(No.XKQ201513)
关键词
移相干涉
视频采集
Zernike多项式拟合
Video capture software
phase shifting measurement
monitor window
phase shifting interferograms
captured video
