三维混合集成M-Z光波导传感器的设计

Three dimension hybrid integration of M-Z waveguide sensor design

设计了基于聚合物材料与无机材料三维混合集成的马赫增德尔(M-Z)光波导传感器,从结构和材料方面提升器件性能。分析器件结构两臂的光波导模式特性,采用有效折射率法得出传感精度曲线,优化波导尺寸为2μm×2μm(长×宽),使其传感精度相比平面结构提升2~3倍,光束传播法模拟光场分布,模拟传感长度差为100~3 000μm时的器件输出曲线。利用多材料混合集成,通过温度控制器件的传感区间,可解决精度退化问题。

Three dimension hybrid integration M-Z waveguide sensor was designed based on polymer and inorganic material.The device properties were improved from the view of structure and material.Modes characters of waveguide structure belong to each M-Z branch were analyzed.The sensing accuracy curves were simulated by effective index method.The optimized waveguide dimension was 2μm×2μm,and the sensing accuracy increased 2-3 times compare with the planar structure.The optical field was simulated using beam propagation method.The output properties were simulated with the changing length difference from 100μm to 3 000μm.Multi-material hybrid integration was utilized to solve the sensing accuracy fade problem.