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浅析单晶硅生长的机理 被引量:1

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摘要 单晶硅作为影响国家未来技术发展的重要材料,对于我国高新技术发展具有战略性地位。论文主要对形成单晶硅的重要方法即直拉法(CZ)单晶硅生长的机理与工艺进行了分析,并对如何提纯材料,提纯减少杂质的措施进行了介绍。
出处 《科学家》 2017年第17期2-2,15,共2页 Scientist
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