5SPENCE W J, CORBETT W T, DOMINGUEZ L R. An electronically controlled piezoelectric insulin pump and valves [J]. IEEE Transactions on Sonics and Ultrasonics, 1978, 25(3): 153-156.
6LINNEMANN R, WOIAS P, SENFF C D, et al. A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases[J]. The 11th IEEE M EMS 1998 Technical Digest Heidelberg, 1998, (25/29) : 532-537.
7VAN LINTEL H T G, VAN-DE Pol F C M, BOUWSTRA S. A piezoelectric micropump based on micromachining of silicon[J]. Sensors and Actuators, 1988, 15:153-167.
8LASER D J, SANTIAGO J G. A review of micropumps [J]. Journal of Micromechanics and Microengineering, 2004, 14(6): 35-64.
9LI Jiahao, KAN Weihong, JIANG Lingsheng, et al. A portable micropump system based on piezoelectric actuation. [C] // United States: Institute of Electrical and Electronics Engineers Computer Society. Piscataway, NJ, USA: IEEE, 2007: 2898-2903.
10MA H K, HOU B R, WU H Y, et al. Development and application of a diaphragm micro-pump with piezoelectric device [J]. Microsystem Technologies, 2008, 14(7) : 1001-1007.