石墨烯/金属接触研究进展

Research Progress of Graphene/Metal Contact

石墨烯/金属接触是石墨烯应用在集成电路领域的一个重要问题,按照其接触方式的不同,介绍了近年来关于石墨烯/金属接触的研究,主要分析了面接触与边缘接触的接触机理以及不同接触方式的器件结构,比较了各种接触方式的优劣。由于金属与石墨烯的电流主要通过边缘传输,通过在石墨烯与金属的接触界面引入边缘接触,增加了电流流经的路径,从而减小石墨烯与金属的接触电阻率。最后总结出边缘接触是最可能优化其接触电阻率的技术方案,并展望了石墨烯/金属接触的研究前景。

Graphene/metal contact is an important issue for graphene application in the field of in- tegrated circuits. The recent studies of the graphene/metal contact are introduced in accordance with the different contact modes. The contact mechanisms of the surface contact and edge contact and the device structures of different contact modes are mainly analyzed, and the advantages and disadvantages for various kinds of contact modes are compared. At the interface between the metal and graphene, the current is mainly transmitted through the edge, so by introducing edge contacts at the contact interface between graphene and metal, the paths of the current flow increase, thereby the contact resistivity between graphene and metal decreases. Finally, it is con- eluded that the edge contact is the most likely technical scheme to optimize the contact resistivity, and the research prospect of the graphene/metal contact is provided.