摘要
孔道表面具有丰富Si-OH的有序介孔氧化硅材料SBA-15薄膜修饰QCM可大幅度提升湿度传感器的灵敏度、响应速度及检测限。本文建立了基于SBA-15的QCM湿度传感器的三维有限元精确仿真模型,分析了纳米湿敏薄膜在电极上的分布状况对传感器的电学性能参数的影响,研究结果对于纳米湿敏薄膜的成膜工艺及新型QCM湿度传感器的优化设计与制造提供了重要的理论参考依据。
SBA-15 thin film modified QCM with ordered mesoporous silica material with rich Si-OH surface can greatly improve the sensitivity,response speed and detection limit of humidity sensor. In this paper,three-dimensional finite element modeling and numerical simulation of QCM humidity sensor based on SBA-15 are carried out. The parameters such as vibration mode,center frequency,electrical impedance and Q value of SBA-15 humidity sensitive film modified QCM sensor are analyzed detailedly,which can be regarded as an important theoretical reference for the optimization design and manufacture of new nano-humidity sensitive film modified QCM sensor.
出处
《南阳理工学院学报》
2017年第4期114-118,共5页
Journal of Nanyang Institute of Technology
基金
2017年度河南省科技攻关项目(172102210418)
2016年度河南省高等学校重点科研项目(16A510021)
关键词
SBA-15
有序介孔硅
湿敏薄膜
QCM
湿度传感器
三维有限元
SBA-15
ordered mesoporous silicon
humidity sensitive film
QCM
humidity sensor
three-dimensional finite element
