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一种用于MEMS加速度传感器的低功耗低噪声全差分电路

A low power, low noise fully differential circuit for MEMS acceleration sensor
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摘要 设计了一种用于MEMS加速度传感器的低功耗低噪声的全差分电路,采用套筒式电路结构,增加了输出阻抗,减少了功耗和噪声。适当的共模反馈,提高了环路足够的补偿,避免了输出信号的失真,确保获得好的相位裕度以及一个快速的反应。在0.5μm CMOS工艺模型下,Cadence Spectre电路仿真的结果表明,电源电压为5 V,频率的范围是0.1 Hz到100 MHz时,得到电路的噪声大小是5.777 891μV·Hz^(–1/2),功耗大小为41.768 m W,版图的面积为1834.18μm×1446.87μm。这一电路可以用于地震监测以及石油勘探等领域。 A low power and low noise with fully differential circuit for MEMS acceleration sensor was described. Folded cascode structure was adopted for the sake of increasing output impedance, decreasing power and reducing noise. In this way, proper common mode feedback structure compensates the loop circuit, avoids the output signal’s distortion, ensures that phase margin is better and gets a quicker response. Based on 0.5 μm CMOS process, the results of Cadence Spectre circuit simulation show that when supply voltage is 5 V, the noise of circuit is 5.777 891 μV· Hz^–1/2 and the power reaches 41.768 mW in the frequency range from 0.1 Hz to 100 MHz. In addition, the area of layout is 1834.18 μm×1446.87 μm. For the specific performance, it can be used in earthquake forecast, oil detection and so on.
出处 《电子元件与材料》 CAS CSCD 2017年第11期38-42,共5页 Electronic Components And Materials
基金 国家自然科学基金资助项目(No.61274043 No.61233010)
关键词 低功耗 低噪声 全差分电路 套筒式 共模反馈 版图 low power low noise fully differential circuit folded cascode common mode feedback layout
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