硅基光电子发光材料与器件

Silicon-based optoelectronic luminescent materials and devices

用光子作为信息载体的光互连是硅集成电路的发展趋势之一,而硅基光互连的实现,必须发展与当前集成电路制造工艺兼容的高效硅基光源.本文概述了近年来国际上硅基光源的主要研究成果,重点介绍了我们研究组在硅量子点、硅晶体缺陷、硅基氮氧化物薄膜和硅基氧化物半导体薄膜发光材料与器件等方面的研究进展.

Optical interconnection using photons as information carriers is one of the trends in silicon integrated circuits. However,the realization of silicon-based optical interconnection must be dependent of efficient silicon-based light sources that are compatible with current IC manufacturing processes. In this paper,our research results of silicon-based light sources in recent years are summarized with special emphasis on the latest progress in silicon-based luminescent materials and devices,including silicon quantum dots,silicon crystal defects,silicon-based nitrogen oxide films and silicon-based oxide semiconductor films.