电动轮廓仪示值误差测量结果不确定度的评定

Evaluation of Uncertainty in Measurement Result of Indication Error of Electric Profiler

表面粗糙度反映的是工件表面微观几何形状的误差,是几何测量的重要领域,在对表面粗糙度进行多参数定量评定过程中,电动轮廓仪的使用最为广泛,本文重点介绍了触针式电动轮廓仪示值误差测量结果不确定度的评定,对表面粗糙度标准的推广及电动轮廓仪技术的发展有着重大的现实意义。

The surface roughness reflects the error of the microscopic geometry of the workpiece surface, which is an important field of geometric measurement. In the process of multi-parameter quantitative evaluation of surface roughness, electric profiler is the most widely used. It is of great practical significance to evaluate the uncertainty of the surface roughness standard and the development of the electric profiler technology.