高频超声热沉积法制备镀银导电薄膜

Preparation of silver coated conductive film by high frequency ultrasonic heat deposition

以硝酸银溶液为前驱液体,聚酰亚胺(PI)薄膜为基材,采用静电热解和高频超声相结合的方法制备镀银导电薄膜。采用X射线衍射(XRD)、透射电子显微镜(TEM)、能谱仪(EDS)、原子力显微镜(AFM)、电阻测试仪等对制得的样品进行表征。结果显示:硝酸银(AgNO_3)为0.15mol/L、电压为20kV、基板和喷嘴距离为4cm、沉积时间30min、200℃退火时,制得的导电薄膜表面方阻低至1.4Ω。

Used silver nitrate solution as precursor and polyimide（PI）film as the substrate,the electrostatic pyrolysis was prepared by a combined process of electrostatic pyrolysis and high-frequency ultrasound.The prepared samples were characterized by X-ray diffraction（XRD）,transmission electron microscopy（TEM）,EDS energy spectrum and atomic force microscope（AFM）resistance tester,etc.The results showed that：silver nitrate（AgNO3）=0.15 mol/L,voltage=20 kV,substrate and nozzle distance of 4 cm,deposition time of 30 minutes,200℃ under annealing,the best performance of film prepared was 1.4Ωof surface resistance.