摘要
基于MEMS技术的压阻式压力传感器在工业领域应用广泛,传感器的可靠性设计是传感器技术的研究热点,针对汽车电子、石油化工等领域对高可靠性压力传感器的需求,提出了高可靠性压力传感器的设计方法。最后,通过可靠性强化试验对设计的传感器进行可靠性评价,试验结果表明该传感器具有极高的可靠性。
Pressure sensor based on MEMS technology is widely used in industry.The reliability technology of pressure sensor is a research hotspot.To meet the requirements of high reliability in automobile electronics and petrochemical industry,a design methord of high reliability pressure sensor was proposed.Finally,the reliability of the sensor was evaluated by the reliability enhancement test,the results show that the sensor has high reliability.
出处
《仪表技术与传感器》
CSCD
北大核心
2017年第10期7-9,32,共4页
Instrument Technique and Sensor
关键词
高可靠性
压力传感器
结构设计
温度补偿
可靠性强化试验
test,the results show that the sensor has high reliability.high reliability
pressure sensor
structure design
temperature compensation
reliability enhancement tes
