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95氧化铝瓷与蓝宝石金属化层对比分析

Comparative Analysis of Metallization between 95% Alumina Ceramics and Sapphires
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摘要 本文采用扫描电镜和能谱研究了不同温度下烧结的95%氧化铝陶瓷和蓝宝石(单晶氧化铝陶瓷)金属化层形貌与元素成分组成,对其金属化现象进行了实验分析。实验结果表明,低温条件(1300℃)下进行烧结,95%氧化铝陶瓷和蓝宝石的金属化层成分与原金属化粉差异不大,金属化层与基体没有互溶作用,金属化层中的锰元素与氧化铝结合形成锰铝尖晶石;高温条件下(1470℃)进行烧结,金属化层中的玻璃相与95%氧化铝陶瓷玻璃相有相互扩散迁移现象;蓝宝石不含玻璃相,且蓝宝石的致密度大于95%氧化铝陶瓷,蓝宝石金属化层中的玻璃相很难向单晶结构的蓝宝石内部扩散。在实验研究的基础上提出了提高蓝宝石金属化质量的技术措施。 Scanning electron microscopy and energy dispersive spectroscopy were used to study the morphology and composition of the metallization of 95%alumina ceramics and sapphire(single crystal alumina ceramics)sintered at different temperatures,and the phenomenon of metallization was analyzed experimentally.The experimental results show that under low sintering temperature(1300℃),the composition of metallization of 95%alumina ceramics and sapphire and the original metal powder have little difference,there is no mutual dissolution between the metallization and the matrix,and the manganese elements combine with alumina in the metallized layer form manganese aluminum spinel;while under high sintering temperature(1470℃),the glassy phases in the metallization layer has a mutual diffusion and migration phenomenon with the 95% alumina ceramic glassy phases.Sapphire does not contain glassy phases,and the density of sapphire is higher than that of 95% alumina ceramics,and so the glassy phases in the sapphire metallization layer is difficult to diffuse into the sapphire with single crystal structure.On the basis of experimental research,the technical measures for improving the quality of sapphire metallization are put forward.
出处 《真空电子技术》 2017年第5期46-50,共5页 Vacuum Electronics
关键词 微波真空电子器件 氧化铝 金属化 玻璃相 Microwave vacuum electron device Alumina Metallization Glassy Phases
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