摘要
根据气体探测系统灵敏度的要求,基于甲烷气体红外吸收光谱特性,结合工艺经验确定了滤波器的技术指标.采用"拆分技术"对气体滤波器进行膜系结构设计,降低了膜层产生的应力.通过电子束加热蒸发沉积薄膜,根据测试结果逆向分析,优化工艺参数.所研制的滤波器在7.669μm波长处峰值透过率达到85.14%,通带半宽度为59nm,覆盖了甲烷气体吸收区域,截止区达到了OD3,很好地抑制了背景噪声.
According to the requirements of sensitivity for gas detection system,based on the characteristics of methane absorption spectrum,combined with the technical experience,the technical indicators of the filter was determined.The ＂split technology＂ was used to design the gas filter for the gas filter,which reduced the film stress.The films were deposited by electron beam heating,and the process parameters were optimized according to the test results.The peak transmittance of the filter reached 85.14% at the wavelength of 7.669μm,and the full of its passband at half maximum is 59 nm,covering the methane gas absorption area.The cut-off depth is OD3 and the narrow-band filter can suppress the background noise well.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2017年第10期74-80,共7页
Acta Photonica Sinica
基金
吉林省重大科技攻关专项(No.20140203002GX)资助~~
关键词
光学薄膜
窄带滤波器
拆分技术
气体泄漏
探测与识别
灵敏度
Optical thin film
Narrow-band filter
Splitting technique
Gas leaks
Detection andrecognition
Sensitivity
