基于相移干涉仪的平面度测量软件设计

Design of Flatness Measurement Software Based on the Phase-Shift Interferometer

以相移干涉法测出的点阵波面数据为基础,设计了计量用平面度测试软件Flat Ex,包括标准平晶的绝对检验、研磨面平尺的斜入射测量和子孔径拼接及三个功能算法模块。通过与等倾干涉仪检定过程的比较,从理论上说明从密集点阵数据中提取稀疏点数据的合理方法,以符合规程的要求或约定俗成的做法。程序已经用于处理Matro Pro和Phase One等多种相移干涉仪数据,提取出符合要求的平面度结果。在相移干涉仪与等倾干涉仪检定结果进行比对实验中,表现出良好的一致性。

In this paper,a flatness measurement software was designed called Flat Ex including three modules which named absolute testing,inclination measurement of milling straight edges and sub-aperture stitching basing on the wave data by using phase-shift interferometer. By comparison with the process in verification using the flatness interferometer with isoclinic circle fringe,this method proves theoretically feasible for extracting sparse points from dense points in accordance with regulations or unwritten ways. Flat Ex can process data from kinds of software in phase-shifting interferometer and bring forward the reasonable requirement result of flatness. By comparison with the results between the phase-shift interferometer and the flatness interferometer with isoclinic circle fringe,it shows a good correlation.