一种固液复合润滑材料的真空摩擦学性能

Tribological Properties of A Solid-liquid Synergetic Lubricating Material under Vacuum Condition

要利用磁控溅射设备在单晶硅表面制备了Ti掺杂的DLC薄膜。研究了类金刚石薄膜和磷酸二丁酯单丁胺离子液体组成的固液复合润滑体系在真空度约为10^(-5)Pa条件下的摩擦学性能,采用非接触式三维表面轮廓仪对薄膜表面形貌和磨痕形貌进行观察分析。结果表明:该体系在高真空下具有较低的摩擦系数和良好的抗磨损性能。相比于Ti掺杂的DLC薄膜,复合体系磨损率低近一个数量级。

Ti - doped DLC films were deposited on the surface of monocrystalline silicon by magnetron sputtering process. The tribological properties of the DLC lubricated with dibutyl phosphate monomethylamine ionic liquid were investigated under the condition of vacuum at about 10 5 Pa. The surface morphology of the DLC and the worn surfaces were observed and analyzed by non - contact three - dimensional surface profiler. The results showed that the solid - liquid synergetic lubricating material had a low friction coefficient and good wear resistance under high vacuum. Compared to Ti- doped DLC films, the wear rate of the solid-liquid synergetic lubricating coatings decreased nearly one order of magnitude.