10kV全固态重复频率方波脉冲源研制

Study of All Solid-state Repetition Square Wave Pulse Power Supply With Output Voltage 10 kV

基于金属氧化物半导体场效应晶体管(MOSFET)和Marx发生器电路,研制了一种在重复频率1~100 Hz下,最高输出脉冲电压10 kV、脉冲宽度从550ns到1μs可调的全固态方波脉冲源。设计中利用直流高压电源作为能源系统,采用MOSFET半导体固态开关替代气体火花隙开关作为放电主开关,用快恢复二极管取代充电电阻。由外部多功能触发器产生脉宽和频率均可调节的触发信号,通过驱动电路控制由MOSFET半导体固态开关构成的放电主开关,经脉冲放电回路在不同负载上实现输出所需的高压方波脉冲。通过实验验证了设计原理及方法的可行性,并给出了单次和重频信号触发下该固态方波脉冲源输出的实验结果。

Based on metal oxide semiconductor field effect transistor（MOSFET） and Marx generator circuit, at a repetition rate of 1-100 Hz was developed,the highest output pulse voltage of 10 kV and a pulse width from 550 ns to 1 s tunable all solid square wave pulse source.In the design,the DC high voltage power supply is used as the energy system, and the MOSFET semiconductor solid state switch is used instead of the gas spark gap switch as the main switch of the discharge.The fast recovery diode is used instead of the charging resistance.The trigger signal generated by the pulse width and frequency can be adjusted by an external trigger function, through the discharge of the main switch control circuit is composed of a MOSFET semiconductor solid-state switch,high voltage square pulse discharge circuit to achieve the output in different load the required pulse.The feasibility of the design principle and method is verified by experiments, and the experimental results of the output of the solid-state square wave pulse triggered by single and double frequency signals are given.