摘要
红外显微热成像系统基于红外热成像、红外图像处理和光学显微技术,能够分析微小物体或局部细节的温度变化,具有无损检测、灵敏度高等优点。对红外显微热成像系统的研究背景进行了概括,介绍了它的基本原理和系统组成,总结了红外显微热成像系统的研究现状及其在微电子器件检测、医学诊断、科学实验研究等方面的应用进展,对其存在的问题进行了分析,并且展望了红外显微热成像系统的未来发展趋势。
The infrared thermal microscope imaging system is based on technologies of infrared thermal imaging, infrared image processing, and optical microscopy. Such a system can be used to analyze temperature changes of tiny objects or local details, with advantages of non-destructive testing, high sensitivity and so on. The research background of the infrared thermal microscope imaging system is summarized in this article, and the fundamentals and system components are presented. In addition, we summarized the research status of the infrared thermal microscope imaging system and its applications in the field of microelectronic device testing, medical diagnosis, and scientific experiment research. Moreover, the existing problems of the infrared thermal microscope imaging system are analyzed, and its future development trend is forecasted.
出处
《红外技术》
CSCD
北大核心
2017年第11期973-978,共6页
Infrared Technology
基金
云南省科技厅省院省校科技合作专项(2014IB007)
国家自然科学基金(5177060654)
云南省胡志宇专家工作站(编号:云科合发[2014]5号)
关键词
红外热成像
红外探测器
红外显微热成像系统
infrared thermal imaging, infrared detector, infrared thermal microscope imaging system
